Dimension

Φ800mm×H900mm

Material

304 stainless steel

Ultimate vacuum

3×10-4Pa

Restore vacuum

4×10-4Pa,≤12 minutes

Vacuum pumping system

mechanical pump+ roots pump+diffusion pump

Control mode

Touch Screen,PLC,Manual and Automatic

Temperature

350℃

Temperature uniformity

Set temperature ± 5 ℃, control precision ±1 ℃

E-Beam Sources

Single gun and power supply

Crystal control instrument

Single probe quartz crystal film thickness tester and the corresponding control system

Ion source

reserved

Resistance of evaporation

reserved

Electrical control system

PLC+touch screen.Water, electricity, gas path fault automatic alarm and protection system.

Cooling-water machine

5P air cooled chiller

Working environment requirements

1. Environment temperature:10～35℃

2 .Relative humidity: no more than 80%

Equipment power requirements

Water source: industrial water softening or circulation water.

Water pressure: 0.2 ~ 0.3 Mpa,
Amount of water > 100 l/min.

Water inflow temperature:≤25℃;

Gas source:pressure 0.6MPa

Power supply: three-phase five-wire system  220 V / 380 V, 50 HZ,

Voltage fluctuation range: 330 ~ 400 V,single-phase 200V~ 230V.

Frequency fluctuation range:50HZ±1HZ;

Equipment consumed power: about 80 kw;

Grounding resistance:≤4Ω