ZZS630 High Precision Optical Film Coating System 

Optical Coating Machine Parameters:

Model:ZZS630 optical coating machine

Vacuum chamber:Φ630mm x H750mm,304 stainless steel

Workpiece plate:Φ570 SR540

Vacuum system:Mechanical pump + diffusion pump + Roots Pump

Baking temperature:Tubular heater,max temperature 350ºC .

Evaporation source: E-beam gun,single power,resistance evaporation

Quartz crystal control:SQC310

Ion source:Kaufman or Hall source

Electrical automatic control:adopts color screen system + PLC control,good man-machine interface and control function.It is matched with crystal control to realize process automation.

Ultimate vacuum:3 X 10-4 Pa.

Recovery vacuum:4 x 10-3,less than 12mins.

Way of control:Manual + Automatic

Power supply:3 phase,380V,50HZ.

Circulating water pressure:0.2~0.4Mpa

Compressed air pressure:above 0.5Mpa

Application:This equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating electrical film,metal film,laser film,cold film,beam splitter film,anti-reflection film,various filters,anti-reflection film,bandpass film,and closing film on the plastic parts,cell phone CLD display,cell phone shell etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. It's the ideal equipment for coating high precision optical thin film.