Resistance Evaporation E-beam Gun Optical Lens Equipment For High Reflective Film

Optical coating machine parameter:

1.Equipment structure:cabinet vertical front opening door.(chamber size: φ920mm×H1000mm).

2.Max temperature:300℃.

3.No-load ultimate vacuum:3×10－4Pa.

4.Restore vacuum:4×10－3Pa,less than 12mins.

5.E-beam gun:2pcs 270degree E-beam gun.Power:8KW adjustable.

6.Control instrument:American Inficon company XTC-3crystal control +six prob system.

7.Vacuum system control adopts IPC +OMRON PLC,can realize whole machine system continuous automatic coating.

8.Between diffusion pump and high vacuum valve equipped with water trap.

9.Main silicon seal adopt fluororubber.

Automatic control system main content:

1) Has perfect fault feedback and operation interlock protection and each system self-diagnostic function.

2) Vacuum system pumpdown exhaust can programming setting.

3) Workpiece plate high speed,low speed rotation programmable settings.

4) Process gas pipe valve and air inflow programmable settings.

5) Baking out ,system programmable settings.

6) Coating vacuum degree can be set on the touch screen in real time.

7) Each pump valve control with PLC automatically finish.

8) Baffle on and off automatic control by crystal instrument.

9) Fault signal and protection signal jointly handle by industrial PC and PLC,and by PLC automatically perform correct action.