AR Coating Machine  Vacuum Coating System for Optical Coatings

AR coating machine brief introduction:

Baking temperature:Max 350 ℃,temperature uniformity:300℃ ±5℃ (40 min)

Vacuum chamber:vacuum chamber size Φ1120×1300MM,304 stainless steel,2 sets Anti-fouling plate.

Controller cabinet: high-tension transformer, filament transformer,electric reactor all adopt resin potting.Equipment can realize automatic NO / OFF machine.

Workpiece frame system:Magnetic liquid sealing device,water jacket all is stainless steel,revolving speed 3～30rpm, AC variable frequency speed regulating, up driven way.

Vacuum degree:Ultimate vacuum 3.0×10 -4 Pa,vacuum holding requirements:after chamber reach ultimate vacuum,close high vacuum valve 12 hours,chamber vacuum degree ≤20Pa,and close high vacuum valve 1hours,chamber vacuum degree ≦6 x 10-1 Pa,restore vacuum time<15 min back to 3X10 -3 Pa.

Pumping system:diffusion pump + mechanical pump+roots pump

Repeatability and uniformity: whole cover film thickness distribution uniformity, each position spectral curve error ±2nm,each cover with good repeatability,the same place repeat 5 times film thickness error of ±3 nm (not less than 7 layers).

E-beam gun: 1pcs,10kw

Resistance evaporation: 1set ,5kw crystal control automatic control can be realized.

Film thickness instruments: American SQC310 ,Crystal point 6 probe,fully automatic coating control system.

Flowmeter: automatically filling different gas flow according to the different crucible .

Cryogenic:Through program control to prevent cryogenic back temperature cause product pollution.

Electric control:PLC programmable controller +LCD color touch screen control whole operation process:vacuum,heater,melt,coating,cryogenic,take ,one key operation.

AR film:420nm-680nm R<0.25%,

Optical coating machine application:

1.For clean energy:

Transparent conductive film, IR cut coating, decoration coating etc.( LED )

2.For display:

AR Coating, Dichroic Mirror, PBS, Cold Mirror etc.

AR/AS(AR/Anti Electromagnetic wave coating) etc.

ITO Transparent Conductive Film etc.(Optical parts and lenses in liqid crystal)

3.For Optical Communication:

NBPF, BBPF, Edge filter, AR Coating, GFF　etc.( DWDM Filter )

4.Semiconductors:

AR Coating, BPF, Edge filter, HR Coating etc.(lenses and optical parts for semiconductor industry facilities laser, optical switch)

5.Optical Storage Media:

AR Coating, BS Coating etc.( optical parts and components for optical disks such as DVD,CDRW,CDR,CD)

6.For Bio-Industry :

BPF,Edge filter,AR Coating,Mirror, HR Coating,Cold Mirror etc.( Optical parts and lenses in liqid crystal projectors,liquid crystal displays, organic electro luminessences)

7.For Vehicle-mounted device

Flat plate display,Vehicle-mounted camera,panel

Acceptance Process:  After machine making ,Seller will inform buyer to come to factory to check, at that time it can be testing for coating sample ,in user factory as the final checking. Seller must install ,testing on time and on the quality .After the whole machine be installed ,tested ,please buyer depend on the technology agreement and acceptance criteria.

What we will do for you ?

1.Installation: The supplier should send engineers to buyer's   factory and help installation, commissioning and support of the production process. The round tickets, room and food should be to be paid by buyer. The buyer should assist and cooperate when needed.

2.Traning:during installation ,operator and maintenance man must full participate .supplier will provide traning in the locale including daily operation ,maintenance ,operation problem analyze and process of urgency.

3.After sale service: One year guarantee ,it will offer the best service in the guarantee or past guarantee .Due to improper use, or other damage to the equipment not itself no warranty, wearing parts is no in the repair. Guarantee begin to the machine finish testing .