ZZS 630 Fully Automatic Optical Thin Film Coating Machine

Breif introduction:this equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating anti-reflection film, bandpass film ,IR-Cut filter etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. It's the ideal equipment for coating high precision optical thin film.

Optical coating machine specification:

Chamber size:Φ630mm X H750mm

Workpiece plate:Φ570mm,SR540

Crystal control:SQC310 single probe,six probes

E-beam gun:two E-beam guns

Vacuum system:Molecular pump + Bipolar rotary vane pump

Ultimate vacuum:9.0 X 10^-5Pa

Restore vacuum:4x10^-3Pa,less than 12 min.

Heating temperature:Max 350ºC.

Power supply:three phase,380V/50HZ

Water pressure:0.2~0.4Mpa

Gas pressure:0.6~0.8Mpa

Weight:2T

Application:

Chengdu Guotai Company:

Workshop:

Certification

Customer visit

Exhibition site:

Customer plant